Aktu Syllabus VLSI Technology (KEC-053) Pdf

Discover the thorough AKTU B.Tech course in VLSI technology, which covers important ideas in integrated circuit design, fabrication, and system integration. Learn about cutting-edge methods influencing the Very Large Scale Integration sector.

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UNIT-1: INTRODUCTION TO IC TECHNOLOGY

• SSI,
• MSI,
• LSI,
• VLSI Integrated Circuits,
• Crystal Growth and Wafer Preparation: Electronic Grade Silicon,
• Czochralski Crystal Growth,
• Silicon Shaping,
• Processing Considerations,
• Wafer Cleaning Technology – Basic Concepts,
• Wet cleaning, Dry cleaning.

UNIT-2: EPITAXY AND OXIDATION

• Epitaxy: Vapor-Phase Epitaxy,
• Molecular Beam Epitaxy,
• Silicon on Insulators,
• Epitaxial Evaluation. 
• Oxidation: Growth Kinetics, Thin Oxides,
• Oxidation Techniques and Systems,
• Oxides Properties.

UNIT-3: LITHOGRAPHY

• Lithography: Optical Lithography,
• Electron beam lithography,
• Photo masks,
• Wet Chemical Etching. 
• Dielectric and Polysilicon Film Deposition: Deposition Processes of Polysilicon,
• Silicon Dioxide,
• Silicon Nitride.

UNIT-4: DIFFUSION AND ION-IMPLANTATION

• Diffusion: Models of diffusion in solids,
• Fick’s 1-Dimensional diffusion equation,
• Diffusion of Impurities in Silicon and Silicon Dioxide,
• Diffusion Equations,
• Diffusion Profiles,
• Diffusion Furnace,
• Solid, Liquid and Gaseous Sources. 
• Ion-Implantation: lon-Implantation Technique,
• Range Theory,
• Implantation Equipment. 

UNIT-5: METALLIZATION & PACKAGING OF VLSI DEVICES

• Metallization: Metallization Application,
• Metallization Choices,
• Physical Vapor Deposition,
• Vacuum Deposition,
• Sputtering Apparatus. 
• Packaging of VLSI devices: Package Types,
• Packaging Design Consideration,
• VLSI Assembly Technologies,
• Package Fabrication Technologies,
• CMOS fabrication steps. 

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